Scanning Electron Microscope



- High-resolution field-emission scanning electron microscope (SEM): Hitachi S-4800

• High-resolution 1.0 nm at 10 kV / 2.0 nm at 1.0 kV
• Chemical analysis through Energy Dispersive X-ray (EDX) spectroscopy
• Scanning Transmission Electron Microscopy (STEM) for cross-sectional imaging

Electrical Measurement System



- Water probe station (Cascade Microtech 12000 series)

• Temperature controller (-65°C to 200°C)
• Semiconductor prarameter analyzer (Agilent 4156C)
• Impedance analyzer (Agilent 4294A)
• Vector network analyzer (up to 65GHz) (Anritsu)

- Current-voltage (I-V), capacitance-voltage (C-V), and high-frequency characteristics of nanostructures


Atomic Force Microscope



- High-resolution scanning probe microscope for nanostructure surface characterization

• Noise and vibration isolation bench

- Full range of SPM techniques

• Electrical characterization measurements
• Electric Force Microscopy (EFM) (tapping mode)
• Tunnel AFM (TUNA) (contact mode)
• Conductive Atomic Force Microscopy (CAFM) (contact mode)
• Scanning Spreading Resistance Microscopy (SSRM) (contact mode)
• Scanning Capacitance Microscopy (SCM) (contact)

- Multi-channel output