The Laboratory continues to actively pursue research in two important areas of silicon technology, namely, deep submicron MOSFET modeling and silicon-based heterostructures. Some of the activities are highlighted as follows.

Two graduate students received appointments as interns in local companies. Mr. Alan Wong, a doctoral student, was working at Advanced Micro Devices during the Summer of 1999, carrying out modeling and simulation activities on submicron CMOS devices. Mr. Fan Zhang, a master’s degree student, has been undertaking product testing activities at SEMICAPS, Inc. since July 1999.

Our new research initiative on MOSFET modeling has progressed well beyond our expectations. Mr. Alan Wong and fellow doctoral student, Mr. Kaiman Chan, have been exploring various physics-based modeling schemes to account for important effects in deep submicron devices, without carrying out full-scale simulations based on two-dimensional drift-diffusion equations. The objective is to generate a compact continuous model for the transistor, to be used in large-scale circuit simulations. Based on our early results, a manuscript has been submitted to the Electron Device Letters, and an abstract submitted to a conference to be held in the Spring of 2000. Our collaborators on this project are Winbond and the National University of Singapore, with our group playing the lead role.

Since January 1996, our Laboratory has been supported by a grant from National Nanofabrication Facility, which allows us to use the facility at Stanford University’s Center for Integrated systems. Dr. Jian Mi, research associate, Mr. Hans Yoong, a master’s degree student, and Mr. Fan Zhang have been qualified users of this facility. Under this grant we continue to produce conference and journal publications based on our research in the area of silicon-based heterostructures, in collaboration with another research group at the National University of Singapore.

The Laboratory activities during the 1998-99 academic year are summarized under six categories: sponsorships, sponsored projects, publications, student theses and project reports, equipment and facility upgrades, and other faculty and student activities. Several representative publications are attached in the Appendix.
 

Laboratory Sponsorships

1. Advanced Micro Devices, $29,500

 
2. Toshiba America Electronic Components, $30,000

 
3. Matsushita Research Institute Tokyo, $20,000

Sponsored Project

1.  "Investigation of SiGeC/Si Heterostructures," National Nanofabrication Facility Users Grant, Stanford University, Center for Integrated Systems, $10,000 in equipment time, beginning 1/1/96, renewed 1/1/99.

Principal Investigator: Cary Y. Yang.
 

1. M. Zamora, G.K. Reeves, G. Gazecki, J. Mi, and C.Y. Yang, "Measurement of Interface States Parameters of Si_1-x-y Ge_xC_y/TiW Schottky Contacts using Schottky Capacitance Spectroscopy," Solid-State Electronics 43, 801-808 (1999).

 
2. D.S. Sugiharto, C.Y. Yang, H. Le, and J.E. Chung, "CMOS Hot-Carrier Reliability," IEEE Circuits and Devices Magazine, Vol. 14, No. 5, 43-51 (1998).

 
3. W.K. Choi, J.H. Chen, L.K. Bera, W. Feng, K.L. Pey, J. Mi, C. Y. Yang, A. Ramam, S.J. Chua, J.S. Pan, A.T.S Wee and R. Liu. "Structural Characterization of Rapid Thermal Oxidized Si_1-x-yGe_xC_y Alloy Films Grown by Rapid Thermal Chemical Vapour Deposition," to be published in Journal of Applied Physics.

 
4. N. A. Wong, K.S. Chan, C.J. Chao, D.B. Kao, S.C. Wong, and C.Y. Yang, "A Semi-empirical Short-channel Continuous Model for Deep Submicron MOSFETs," submitted to Electron Device Letters.

Conference Papers

1. W.K. Choi, L.K. Bera, J.H. Chen, W. Feng, K.L. Pey, H. Yoong, J. Mi, F. Zhang, and C.Y. Yang, "Structural Characterization of Rapid Thermal Oxidized Silicon-Germanium-Carbon Alloy Films," Proceedings of the 5^th International Conference on Advanced Materials, June 13-18, 1999, Beijing, China.

 
2. H. Yoong, J. Mi, F. Zhang, C.Y. Yang, J.H. Chen, and W.K. Choi, "Characterization of Oxides and Interfaces Resulting from Rapid Thermal Oxidation of Silicon-Germanium-Carbon Alloy Films," American Physical Society (APS) Meeting, Atlanta (March 1999). Abstract in Bulletin of the APS, 44, 1779 (1999).

 

1. C.Y. Yang, "Ultra-thin Oxide Characterization," presented at KAIST (Korea) and Winbond (Taiwan), September 1998.

 
2. N.A. Wong, K.S. Chan, and C.Y. Yang, "A Semi-empirical Continuous Model for Deep Submicron MOSFETs," presented at Intel, June 1, 1999, Hitachi, Ltd. (Japan), June 22, 1999, and the National University of Singapore, July 21, 1999.

Student Theses and Projects Completed

1. "SiGeC Device Fabrication and Characterization," Hans Yoong and Fan Zhang, Graduate Research Project, completed June 1999.Advisor: Professor Yang

 
2. "Compact Continuous Models for Submicron MOSFETs," Alan N. Wong and Kaiman Chan, Graduate Research Project, first phase completed August 1999.Advisor: Professor Yang

Equipment and Facility Upgrades

The following instruments were donated by Toshiba America Electronics Components and have been installed in the Laboratory’s clean room.

1. Ellipsometer, Gaertner Scientific, to be used by students and researchers for dielectric film thickness and optical property measurements.

 
2. Nanospec, Nanometrics Model 210-668101, to be used for measurements of various dielectric, metal, and photoresist film thicknesses.

 
3. Computerized Surface Profiler with Hood Tencor Model 10-2140, to be used for mapping topography of processed wafers.

Other Faculty and Student Activities

1. Professor Yang was elected IEEE Fellow, 1999, "for contributions to microelectronic education and the understanding of interfacial properties of silicon-based devices."

 
2. Professor Yang serves as an Advisory Board Member for the International Technological University in Santa Clara.

 
3. Professor Yang serves as a Board Member for the Community Health Awareness Council in Mountain View, California.

 
4. Professor Yang served on the Engineering Dean’s Evaluation Committee.

 
5. Professor Yang serves as a member of the University Planning Council at Santa Clara University.

 
6. Professor Yang serves as a member of the Steering Committee for the Center for Science, Technology, and Society at Santa Clara University.

 
7. Professor Yang served as a panelist in the Colloquium on "The Dynamic Interplay of Science and Technology with Culture and Society – An Interactive Discussion," November 9, 1998.

 
8. Professor Yang served on the Program Committee, Fifth International Conference on Solid-State and Integrated-Circuit Technology, October 1998, Beijing, China.

 
9. Professor Yang serves as Vice President, IEEE Electron Devices Society .

 
10. Professor Yang served as the Regions/Chapters Chair of the IEEE Electron Devices Society (EDS), and was an elected member of the EDS AdCom.

11. Professor Yang served as a reviewer of National Science Foundation grant proposals.

 
12. Professor Yang served as a reviewer of grant proposals from Council for Higher Education (Hong Kong).

 
13. Professor Yang served on the International Advisory Committee, 7^th International Symposium on Physical and Failure Analysis of Integrated Circuits, July 1999, Singapore.

 
14. Professor Yang served on the Technical Program Committee, 1999 International Symposium of VLSI Technology, System, and Applications, June 1999, Taiwan.

 
15. Professor Yang served on the Jury of Award, Eta Kappa Nu C. Holms MacDonald Outstanding Teaching Award, 1999.